JPH0411544U - - Google Patents
Info
- Publication number
- JPH0411544U JPH0411544U JP5294490U JP5294490U JPH0411544U JP H0411544 U JPH0411544 U JP H0411544U JP 5294490 U JP5294490 U JP 5294490U JP 5294490 U JP5294490 U JP 5294490U JP H0411544 U JPH0411544 U JP H0411544U
- Authority
- JP
- Japan
- Prior art keywords
- light
- transmitting
- minute
- intensity
- shielding patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000011358 absorbing material Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5294490U JPH0411544U (en]) | 1990-05-21 | 1990-05-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5294490U JPH0411544U (en]) | 1990-05-21 | 1990-05-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0411544U true JPH0411544U (en]) | 1992-01-30 |
Family
ID=31573690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5294490U Pending JPH0411544U (en]) | 1990-05-21 | 1990-05-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0411544U (en]) |
-
1990
- 1990-05-21 JP JP5294490U patent/JPH0411544U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2816832B2 (ja) | 位相シフトマスクの構造及び製造方法 | |
DE69132217D1 (de) | Strukturierte Maske mit transparenter Ätzstopschicht | |
DE69014785D1 (de) | Formgebung mit einer flächenmustergebenden Maske. | |
JPH0411544U (en]) | ||
JPS63114000U (en]) | ||
JPS62137438U (en]) | ||
JPH0316151U (en]) | ||
JP3290808B2 (ja) | 回折格子パターンおよびその作製方法 | |
JPS63109988U (en]) | ||
JPS62118235U (en]) | ||
JPH03105648U (en]) | ||
JPS60175001A (ja) | マイクロレンズアレ− | |
JPH0457854U (en]) | ||
JPS62161250U (en]) | ||
JPS6450423A (en) | Formation of resist-pattern | |
JPH0313759U (en]) | ||
JPH0431146U (en]) | ||
JPH02138416U (en]) | ||
JPH0356127U (en]) | ||
JPH02213122A (ja) | レジストパターンの製造方法 | |
JPS643847U (en]) | ||
JPS6372639U (en]) | ||
JPS62188771U (en]) | ||
JPS62199734U (en]) | ||
JPH0339124U (en]) |